SEMI OpenIR  > 半导体集成技术工程研究中心
一种扫描探针及其制作方法
杨晋玲; 何欢; 张金英; 杨富华
Rights Holder中国科学院半导体所
Date Available2016-09-28
Country中国
Subtype发明
Subject Area微电子学
Application Date2015-03-23
Application NumberCN201510128943.7
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/27569
Collection半导体集成技术工程研究中心
Recommended Citation
GB/T 7714
杨晋玲,何欢,张金英,等. 一种扫描探针及其制作方法.
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