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Two new methods to improve the lithography precision for SU-8 photoresist on glass substrate 期刊论文
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2012, 页码: 337-340
Authors:  Mao, Xu;  Yang, Jinling;  Ji, An;  Yang, Fuhua
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Sensitive detection of infrared photons using a high-Q microcantilever 期刊论文
Journal of Semiconductors, 2011, 卷号: 32, 期号: 9, 页码: 94010
Authors:  Zhang, Fengxin;  Zhu, Yinfang;  Yang, Jinling;  Cao, Lixin;  Yang, J.(jlyang@semi.ac.cn)
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Chemical Sensors  Composite Micromechanics  Drag Reduction  Nanocantilevers  Phase Modulation  Photons  
适用于激光共聚焦测量装置的光学窗口片 专利
专利类型: 实用新型, 申请日期: 2010-08-12, 公开日期: 2010-01-13, 2010-08-12
Inventors:  杨晋玲;  周美强;  周 威;  唐龙娟;  朱银芳;  杨富华
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微机电系统薄膜材料力学性能与可靠性测试方法和装置 专利
专利类型: 发明, 申请日期: 2009-09-02, 公开日期: 4005
Inventors:  杨晋玲;  周 威;  杨富华 
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Stress and resistivity controls on in situ boron doped LPCVD polysilicon films for high-Q MEMS applications 期刊论文
半导体学报, 2009, 卷号: 30, 期号: 8, 页码: 34-38
Authors:  Xie Jing;  Liu Yunfei;  Yang Jinling;  Tang Longjuan;  Yang Fuhua
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Dependence of wet etch rate on deposition, annealing conditions and etchants for PECVD silicon nitride film 期刊论文
半导体学报, 2009, 卷号: 30, 期号: 9, 页码: 151-154
Authors:  Tang Longjuan;  Zhu Yinfang;  Yang Jinling;  Li Yan;  Zhou Wei;  Xie Jing;  Liu Yunfei;  Yang Fuhua
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适用于激光共聚焦测量装置的光学窗口片 专利
专利类型: 实用新型, 专利号: CN200920106986.5, 公开日期: 2011-08-31
Inventors:  杨晋玲;  周美强;  周 威;  唐龙娟;  朱银芳;  杨富华
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基于局域加热技术的圆片级低温键合系统及装置 专利
专利类型: 发明, 专利号: CN102502481A, 公开日期: 2012-09-07, 2012-06-20, 2012-06-20, 2012-09-07
Inventors:  毛旭;  方志强;  杨晋玲;  杨富华
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用于微机电系统器件的圆片级三维封装方法 专利
专利类型: 发明, 专利号: CN102363520A, 公开日期: 2012-09-07, 2012-02-29, 2012-09-07
Inventors:  郑海洋;  杨晋玲;  杨富华
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采用光刻和干法刻蚀制作倾斜侧壁二氧化硅结构的方法 专利
专利类型: 发明, 专利号: CN200910081983.5, 公开日期: 2011-08-31
Inventors:  唐龙娟;  杨晋玲;  解婧;  李艳;  杨富华
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