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title: 磁控溅射方法制备碳化硅薄膜工艺
author: 陈诺夫;  杨霏;  尹志岗;  柴春林;  吴金良
metadata_47: 2005-3-16
Appears in Collections:半导体研究所机构知识库_专利

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Recommended Citation:
陈诺夫;杨霏;尹志岗;柴春林;吴金良,磁控溅射方法制备碳化硅薄膜工艺 ,CN03158500.0,20030910
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