SEMI OpenIR  > 半导体集成技术工程研究中心
脉冲激光退火制备Ni/SiC欧姆接触
刘敏
Subtype硕士
Thesis Advisor杨富华
2016-05-22
Degree Grantor中国科学院研究生院
Place of Conferral北京
Degree Discipline电子与通信工程
Keyword脉冲激光退火 Sic欧姆接触 数值模拟 接触特性
Subject Area半导体物理 ; 半导体材料
Date Available2016-05-26
Document Type学位论文
Identifierhttp://ir.semi.ac.cn/handle/172111/27055
Collection半导体集成技术工程研究中心
Recommended Citation
GB/T 7714
刘敏. 脉冲激光退火制备Ni/SiC欧姆接触[D]. 北京. 中国科学院研究生院,2016.
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