SEMI OpenIR  > 半导体集成技术工程研究中心
频率可切换的微机械谐振器
赵晖; 杨晋玲; 骆伟; 杨富华
Rights Holder中国科学院半导体研究所
Date Available2013-09-25
Country中国
Subtype发明
Subject Area微电子学
Application Date2013-05-15
Application NumberCN201310178457.7
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/25614
Collection半导体集成技术工程研究中心
Recommended Citation
GB/T 7714
赵晖,杨晋玲,骆伟,等. 频率可切换的微机械谐振器.
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频率可切换的微机械谐振器.pdf(700KB) 限制开放LicenseApplication Full Text
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