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基于谐振式微悬臂梁结构的高灵敏生化传感器
杨晋玲; 王帅鹏; 王晶晶; 杨富华
Rights Holder中国科学院半导体研究所
Date Available2012-10-17
Country中国
Subtype发明
Subject Area微电子学
Application Date2012-07-13
Application NumberCN201210243513.6
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/25283
Collection半导体集成技术工程研究中心
Recommended Citation
GB/T 7714
杨晋玲,王帅鹏,王晶晶,等. 基于谐振式微悬臂梁结构的高灵敏生化传感器.
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