SEMI OpenIR  > 半导体集成技术工程研究中心
MEMS惯性导航器件的结构级鲁棒性设计
司朝伟
Subtype博士
Thesis Advisor杨富华 ; 罗毅
2014-07
Degree Grantor中国科学院研究生院
Place of Conferral北京
Degree Discipline电子科学
Subject Area半导体器件
Date Available2014-07-16
Document Type学位论文
Identifierhttp://ir.semi.ac.cn/handle/172111/25141
Collection半导体集成技术工程研究中心
Recommended Citation
GB/T 7714
司朝伟. MEMS惯性导航器件的结构级鲁棒性设计[D]. 北京. 中国科学院研究生院,2014.
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