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多面栅FinFET的制备与电学特性研究
张严波
Subtype博士
Thesis Advisor杨富华 ; 韩伟华
2012
Degree Grantor中国科学院研究生院
Place of Conferral北京
Degree Discipline微电子学与固体电子学
Subject Area微电子学
Date Available2012-06-18
Document Type学位论文
Identifierhttp://ir.semi.ac.cn/handle/172111/23169
Collection半导体集成技术工程研究中心
Recommended Citation
GB/T 7714
张严波. 多面栅FinFET的制备与电学特性研究[D]. 北京. 中国科学院研究生院,2012.
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