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The ICP etching technology of 3C-SiC films
Ning J (Ning Jin); Gong QC (Gong Quancheng); Sun GS (Sun Guosheng); Liu ZL (Liu Zhongli)
2006
Conference NameInternational MEMS Conference 2006
Source PublicationINTERNATIONAL MEMS CONFERENCE 2006, 34: 511-515 2006
Conference DateMAY 09-12, 2006
Conference PlaceSingapore, SINGAPORE
Subject Area微电子学
Indexed ByCPCI(ISTP)
Language英语
Document Type会议论文
Identifierhttp://ir.semi.ac.cn/handle/172111/21414
Collection半导体集成技术工程研究中心
Recommended Citation
GB/T 7714
Ning J ,Gong QC ,Sun GS ,et al. The ICP etching technology of 3C-SiC films[C],2006.
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