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GaInNAs/GaAs quantum well lasers grown by solid-source molecular beam epitaxy | |
Pan Z; Li LH; Wang XY; Lin YW; Pan Z Chinese Acad Sci Inst Semicond State Key Lab Integrated Optoelect POB 912 Beijing 100083 Peoples R China. | |
2000 | |
会议名称 | Conference on Optoelectronic and Microelectronic Materials and Devices |
会议录名称 | COMMAD 2000 PROCEEDINGS |
页码 | 491-496 |
会议日期 | DEC 06-08, 2000 |
会议地点 | BUNDOORA, AUSTRALIA |
出版地 | 345 E 47TH ST, NEW YORK, NY 10017 USA |
出版者 | IEEE |
ISBN | 0-7803-6698-0 |
部门归属 | chinese acad sci, inst semicond, state key lab integrated optoelect, beijing 100083, peoples r china |
摘要 | The growth of GaInNAs/GaAs quantum wells (QW) was investigated by solid-source molecular beam epitaxy. N was introduced by a dc-active plasma source. The effect of growth conditions such as on the N incorporation and photoluminescence (PL) intensity of the QWs has been studied. The PL peak intensity decreased and the PL fun width at half maximum increased with increasing N concentrations. The highest N concentration of 2.6% in a GaInNAs/GaAs QW was obtained, and corresponding to a PL peak wavelength of 1.57 mum at 10K. Rapid thermal annealing at 850degreesC significantly improved the crystal quality of the QWs. An optimum annealing time of 5s at 850degreesC was obtained. A GaInNAs/GaAs SQW laser with the emitting wavelength of 1.2 mum and a high characteristic temperature of 115 K was achieved at room temperature. |
关键词 | Operation 会议主办方: La Trobe Univ Depts Electr Engn & Phys |
学科领域 | 半导体材料 |
主办者 | IEEE Electron Devices Soc.; IEEE Lasers & Electron Opt Soc.; IEEE Australia Chapter.; Lasers & Electron Opt Soc.; Australian Mat Res Soc.; Australian Inst Phys.; Philips Analyt.; Balzers Scitek Pty Ltd.; Heys Technologies Int Pty Ltd.; Oxford Instruments, Plasma Technol Grp.; Stanton Sci.; Thermo Optek (Australia) Pty Ltd.; Melbourne Convent & Marketing Bur.; La Trobe Univ, Ctr Mat & Surface Sci. |
收录类别 | CPCI-S |
语种 | 英语 |
文献类型 | 会议论文 |
条目标识符 | http://ir.semi.ac.cn/handle/172111/13697 |
专题 | 中国科学院半导体研究所(2009年前) |
通讯作者 | Pan Z Chinese Acad Sci Inst Semicond State Key Lab Integrated Optoelect POB 912 Beijing 100083 Peoples R China. |
推荐引用方式 GB/T 7714 | Pan Z,Li LH,Wang XY,et al. GaInNAs/GaAs quantum well lasers grown by solid-source molecular beam epitaxy[C]. 345 E 47TH ST, NEW YORK, NY 10017 USA:IEEE,2000:491-496. |
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