二次离子质谱分析的应用基础研究

SEMI OpenIR > 中国科学院半导体研究所（2009年前）

Subject Area	半导体物理
	二次离子质谱分析的应用基础研究
	王佑祥; 查良镇; 姜志雄; 陈春华
Subtype	院自然科学奖
Award Level	三等奖
	1997
Keyword	离子质谱
Language	中文
Document Type	成果
Identifier	http://ir.semi.ac.cn/handle/172111/11106
Collection	中国科学院半导体研究所（2009年前）
Recommended Citation GB/T 7714	王佑祥,查良镇,姜志雄,等. 二次离子质谱分析的应用基础研究. 1997.

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