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中国科学院半导体研究所机构知识库
Knowledge Management System Of Institute of Semiconductors,CAS
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中科院半导体材料科学... [1]
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Gao Jie [1]
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2021 [1]
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中文 [1]
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硅衬底上氮化锆薄膜磁控溅射制备生长研究
学位论文
, 中国科学院半导体研究所: 中国科学院大学, 2021
Authors:
高洁
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Submit date：2021/06/16
