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中国科学院半导体研究所机构知识库
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半导体集成技术工程研... [3]
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徐晓娜 [1]
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Patent [3]
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ICP干法刻蚀工艺制备剖面为正梯形的台面的方法
专利
专利类型: 发明, 公开日期: 2013-08-21
Inventors:
徐晓娜
;
胡传贤
;
樊中朝
;
王晓东
;
杨富华
Adobe PDF(1075Kb)
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View/Download：785/82
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Submit date：2014/11/17
利用飞秒激光制备金属-半导体接触电极的方法
专利
专利类型: 发明, 专利号: CN201010283562.3, 公开日期: 2011-08-31
Inventors:
徐晓娜
;
李越强
;
王晓东
;
杨富华
Adobe PDF(264Kb)
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View/Download：1194/262
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Submit date：2011/08/31
一种基于自组织量子点的存储器及其制备方法
专利
专利类型: 发明, 专利号: CN102136492A, 公开日期: 2012-09-07, 2011-07-27, 2012-09-07
Inventors:
李越强
;
王晓东
;
徐晓娜
;
刘雯
;
陈燕玲
;
杨富华
Adobe PDF(572Kb)
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View/Download：1374/357
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Submit date：2012/09/07
