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中国科学院半导体研究所机构知识库
Knowledge Management System Of Institute of Semiconductors,CAS
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半导体材料科学中心 [1]
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段瑞飞 [1]
羊建坤 [1]
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Patent [1]
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中文 [1]
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一种化学气相沉积装置
专利
专利类型: 发明, 专利号: CN201010162506.4, 公开日期: 2011-08-31
Inventors:
段瑞飞
;
曾一平
;
王军喜
;
冉军学
;
胡国新
;
羊建坤
;
梁勇
;
路红喜
;
李晋闽
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Submit date：2011/08/31
