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中国科学院半导体研究所机构知识库
Knowledge Management System Of Institute of Semiconductors,CAS
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中国科学院半导体研究... [1]
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赵冀 [1]
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Patent [1]
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2007 [1]
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中文 [1]
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可以修整抛光晶片平整度的抛光头
专利
专利类型: 发明, 申请日期: 2007-09-05, 公开日期: 2009-06-04, 2009-06-11
Inventors:
朱蓉辉
;
惠峰
;
卜俊峰
;
郑红军
;
赵冀
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Submit date：2009/06/11
