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A SIMPLE METHOD FOR EFFECTIVELY RESTRAIN ELECTROCHEMICAL CORROSION OF POLYCRYSTALLINE SILICON BY HF-BASED SOLUTIONS 会议论文
PROCEEDINGS: IEEE MICRO ELECTRO MECHANICAL SYSTEMS 页: 205-208, Cancun, MEXICO, 2011
作者:  Xie J (Xie J.);  Liu YF (Liu Y. F.);  Zhang ML (Zhang M. L.);  Yang JL (Yang J. L.);  Yang FH (Yang F. H.)
Adobe PDF(2599Kb)  |  收藏  |  浏览/下载：1811/358  |  提交时间：2011/12/13
The ICP etching technology of 3C-SiC films 会议论文
INTERNATIONAL MEMS CONFERENCE 2006, 34: 511-515 2006, Singapore, SINGAPORE, MAY 09-12, 2006
作者:  Ning J (Ning Jin);  Gong QC (Gong Quancheng);  Sun GS (Sun Guosheng);  Liu ZL (Liu Zhongli)
Adobe PDF(325Kb)  |  收藏  |  浏览/下载：1710/476  |  提交时间：2011/07/14