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Polymorphous silicon nanowires synthesized by plasma-enhanced chemical vapor deposition 会议论文
QUANTUM CONFINED SEMICONDUCTOR NANOSTRUCTURES, 737, BOSTON, MA, DEC 02, 2001-DEC 05, 2002
作者:  Zeng XB;  Liao XB;  Diao HW;  Hu ZH;  Xu YY;  Zhang SB;  Chen CY;  Chen WD;  Kong GL;  Zeng XB Chinese Acad Sci Inst Semicond State Key Lab Surface Phys Beijing 100083 Peoples R China.
Adobe PDF(683Kb)  |  收藏  |  浏览/下载：1484/333  |  提交时间：2010/10/29
Laser-ablation  Semiconductor Nanowires  Growth  Mechanism  Evaporation  Diameter  Wires  
Effects and numerical analysis of argon gas flow on the oxygen concentration in Czochralski silicon single crystal growth 会议论文
MICROELECTRONIC ENGINEERING, 66 (1-4), XIAN, PEOPLES R CHINA, JUN 10-14, 2002
作者:  Zhang ZC;  Ren BY;  Chen YH;  Yang SY;  Wang ZG;  Zhang ZC Chinese Acad Sci Inst Semicond Lab Semicond Mat Sci Beijing 100083 Peoples R China.
Adobe PDF(389Kb)  |  收藏  |  浏览/下载：1344/254  |  提交时间：2010/11/15
Czochralski Method  Growth From Melt  Semiconductor Silicon  Argon Gas Flow  Computer Simulation  Oxygen Content  Furnace Pressure