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SEMI OpenIR  > 中国科学院半导体研究所（2009年前）
半导体晶片精密化学机械抛光剂
朱蓉辉; 惠峰; 卜俊鹏; 郑红军; 赵冀
2007-10-03
Date Available2009-06-04 ; 2009-06-11
Subtype发明
Application Date2006-03-31
Language中文
Application NumberCN200610066889.9
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/4145
Collection中国科学院半导体研究所（2009年前）
Recommended Citation
GB/T 7714		 朱蓉辉,惠峰,卜俊鹏,等. 半导体晶片精密化学机械抛光剂[P]. 2007-10-03.
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CN200610066889.9.pdf（327KB） 限制开放--Application Full Text
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