Knowledge Management System Of Institute of Semiconductors,CAS
| 多层金属间氧化物脊形波导结构及其制作方法 | |
陈弘达; 黄北举 ; 顾明; 刘海军
| |
| 2007-09-12 | |
| Date Available | 2009-06-04 ; 2009-06-11 |
| Subtype | 发明 |
| Application Date | 2006-03-06 |
| Language | 中文 |
| Application Number | 200610058659 |
| Document Type | 专利 |
| Identifier | http://ir.semi.ac.cn/handle/172111/3877 |
| Collection | 中国科学院半导体研究所（2009年前） |
| Recommended Citation GB/T 7714 | 陈弘达,黄北举,顾明,等. 多层金属间氧化物脊形波导结构及其制作方法[P]. 2007-09-12. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 200610058659.pdf（941KB） | 限制开放 | -- | Application Full Text | |||
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