SEMI OpenIR
碳化硅电子材料同质外延生长研究
郭宁
Subtype硕士
2024-05
Degree Grantor中国科学院大学
Place of Conferral中国科学院半导体研究所
Language中文
Date Available2024-06
Document Type学位论文
Identifierhttp://ir.semi.ac.cn/handle/172111/31856
Collection中国科学院半导体研究所
Recommended Citation
GB/T 7714
郭宁. 碳化硅电子材料同质外延生长研究[D]. 中国科学院半导体研究所. 中国科学院大学,2024.
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GK2024135-郭宁-碳化硅电子材料(6521KB)学位论文 限制开放CC BY-NC-SAApplication Full Text
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