SEMI OpenIR  > 半导体集成技术工程研究中心
高性能MEMS加速度计的研究与制备
张萌
Subtype博士
2020-05
Degree Grantor中国科学院大学
Place of Conferral中国科学院半导体研究所
Language中文
Date Available2020-05
Document Type学位论文
Identifierhttp://ir.semi.ac.cn/handle/172111/29884
Collection半导体集成技术工程研究中心
Recommended Citation
GB/T 7714
张萌. 高性能MEMS加速度计的研究与制备[D]. 中国科学院半导体研究所. 中国科学院大学,2020.
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2020092-公开-张萌-博士-高性能(5845KB)学位论文 限制开放CC BY-NC-SAApplication Full Text
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