SEMI OpenIR  > 半导体集成技术工程研究中心
4H-SiC UMOSFET关键工艺研发
刘敏
Subtype博士
2019-06
Degree Grantor中国科学院大学
Place of Conferral中国科学院半导体研究所
Language中文
Document Type学位论文
Identifierhttp://ir.semi.ac.cn/handle/172111/29233
Collection半导体集成技术工程研究中心
Recommended Citation
GB/T 7714
刘敏. 4H-SiC UMOSFET关键工艺研发[D]. 中国科学院半导体研究所. 中国科学院大学,2019.
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2019086-刘敏-博士-4H-SiC(5200KB)学位论文 限制开放CC BY-NC-SAApplication Full Text
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