降低基区电阻率的GaN基HBT外延结构及生长方法 | |
张连; 张韵; 王军喜; 李晋闽 | |
Rights Holder | 中国科学院半导体所 |
Date Available | 2016-09-29 |
Country | 中国 |
Subtype | 发明 |
Subject Area | 半导体器件 |
Application Date | 2015-06-08 |
Application Number | CN201510309494.6 |
Document Type | 专利 |
Identifier | http://ir.semi.ac.cn/handle/172111/27635 |
Collection | 中科院半导体照明研发中心 |
Recommended Citation GB/T 7714 | 张连,张韵,王军喜,等. 降低基区电阻率的GaN基HBT外延结构及生长方法. |
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File Name/Size | DocType | Version | Access | License | ||
降低基区电阻率的GaN基HBT外延结构及(622KB) | 限制开放 | License | Application Full Text |
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