SEMI OpenIR  > 中科院半导体材料科学重点实验室
刘胜北; 何志; 刘斌; 杨香; 刘兴昉; 张峰; 王雷; 田丽欣; 刘敏; 申占伟; 赵万顺; 樊中朝; 王晓峰; 王晓东; 赵永梅; 杨富华; 孙国胜; 曾一平
Rights Holder中国科学院半导体所
Date Available2016-09-29
Subject Area半导体材料
Application Date2015-01-04
Application NumberCN201510002211.3
Document Type专利
Recommended Citation
GB/T 7714
刘胜北,何志,刘斌,等. 一种碳化硅欧姆接触电极及其制作方法.
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一种碳化硅欧姆接触电极及其制作方法.pd(1167KB) 限制开放LicenseApplication Full Text
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