SEMI OpenIR  > 光电子器件国家工程中心
分布反馈激光器中基于纳米压印光栅干法刻蚀的方法
张奇; 赵懿昊; 董振; 刘素平; 马骁宇
Rights Holder中国科学院半导体所
Date Available2016-09-22
Country中国
Subtype发明
Subject Area半导体器件
Application Date2015-06-17
Application NumberCN201510338379.1
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/27542
Collection光电子器件国家工程中心
Recommended Citation
GB/T 7714
张奇,赵懿昊,董振,等. 分布反馈激光器中基于纳米压印光栅干法刻蚀的方法.
Files in This Item:
File Name/Size DocType Version Access License
分布反馈激光器中基于纳米压印光栅干法刻蚀(294KB) 限制开放LicenseApplication Full Text
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[张奇]'s Articles
[赵懿昊]'s Articles
[董振]'s Articles
Baidu academic
Similar articles in Baidu academic
[张奇]'s Articles
[赵懿昊]'s Articles
[董振]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[张奇]'s Articles
[赵懿昊]'s Articles
[董振]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.