| 分布反馈激光器中基于纳米压印光栅干法刻蚀的方法 | |
| 张奇; 赵懿昊; 董振; 刘素平; 马骁宇 | |
| Rights Holder | 中国科学院半导体所 |
| Date Available | 2016-09-22 |
| Country | 中国 |
| Subtype | 发明 |
| Subject Area | 半导体器件 |
| Application Date | 2015-06-17 |
| Application Number | CN201510338379.1 |
| Document Type | 专利 |
| Identifier | http://ir.semi.ac.cn/handle/172111/27542 |
| Collection | 光电子器件国家工程中心 |
| Recommended Citation GB/T 7714 | 张奇,赵懿昊,董振,等. 分布反馈激光器中基于纳米压印光栅干法刻蚀的方法. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 分布反馈激光器中基于纳米压印光栅干法刻蚀（294KB） | 限制开放 | License | Application Full Text | |||
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