AWG输出波导与探测器有缝对接的集成器件及制备方法

SEMI OpenIR > 固态光电信息技术实验室

	AWG输出波导与探测器有缝对接的集成器件及制备方法
	吕倩倩; 韩勤; 杨晓红; 尹伟红
Rights Holder	中国科学院半导体所
Date Available	2016-09-22
Country	中国
Subtype	发明
Subject Area	光电子学
Application Date	2015-06-30
Application Number	CN201510385905.X
Document Type	专利
Identifier	http://ir.semi.ac.cn/handle/172111/27516
Collection	固态光电信息技术实验室
Recommended Citation GB/T 7714	吕倩倩,韩勤,杨晓红,等. AWG输出波导与探测器有缝对接的集成器件及制备方法.

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