硅衬底及其制备方法 | |
袁国栋; 王克超; 李晋闽; 吴瑞伟; 黄芳; 王乐 | |
Rights Holder | 中国科学院半导体所 |
Date Available | 2016-09-22 |
Country | 中国 |
Subtype | 发明 |
Subject Area | 半导体器件 |
Application Date | 2015-05-22 |
Application Number | CN201510266643.5 |
Document Type | 专利 |
Identifier | http://ir.semi.ac.cn/handle/172111/27483 |
Collection | 中科院半导体照明研发中心 |
Recommended Citation GB/T 7714 | 袁国栋,王克超,李晋闽,等. 硅衬底及其制备方法. |
Files in This Item: | ||||||
File Name/Size | DocType | Version | Access | License | ||
硅衬底及其制备方法.pdf(1466KB) | 限制开放 | License | Application Full Text |
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