倒装阳极的纳米真空三极管结构及制备方法 | |
梁锋; 陈平; 赵德刚; 侍铭; 刘宗顺; 江德生 | |
Rights Holder | 中国科学院半导体所 |
Date Available | 2016-09-22 |
Country | 中国 |
Subtype | 发明 |
Subject Area | 光电子学 |
Application Date | 2015-08-24 |
Application Number | CN201510520866.X |
Document Type | 专利 |
Identifier | http://ir.semi.ac.cn/handle/172111/27476 |
Collection | 光电子研究发展中心 |
Recommended Citation GB/T 7714 | 梁锋,陈平,赵德刚,等. 倒装阳极的纳米真空三极管结构及制备方法. |
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倒装阳极的纳米真空三极管结构及制备方法.(438KB) | 限制开放 | License | Application Full Text |
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