SEMI OpenIR  > 全固态光源实验室
采用双模式激光气体击穿方式下的点火装置及方法
林学春; 高文焱; 于海娟; 张玲; 邹淑珍; 张志研; 王奕博; 陈寒
Rights Holder中国科学院半导体所
Date Available2016-09-22
Country中国
Subtype发明
Subject Area半导体器件
Application Date2015-08-24
Application NumberCN201510520845.8
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/27473
Collection全固态光源实验室
Recommended Citation
GB/T 7714
林学春,高文焱,于海娟,等. 采用双模式激光气体击穿方式下的点火装置及方法.
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