SEMI OpenIR  > 中科院半导体材料科学重点实验室
一种多片碳化硅半导体材料制造装置
闫果果; 孙国胜; 刘兴昉; 张峰; 王雷; 赵万顺; 曾一平
Rights Holder中国科学院半导体所
Date Available2016-09-12
Country中国
Subtype发明
Subject Area半导体材料
Application Date2014-12-17
Application NumberCN201410787354.5
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/27447
Collection中科院半导体材料科学重点实验室
Recommended Citation
GB/T 7714
闫果果,孙国胜,刘兴昉,等. 一种多片碳化硅半导体材料制造装置.
Files in This Item:
File Name/Size DocType Version Access License
一种多片碳化硅半导体材料制造装置.pdf(445KB) 限制开放LicenseApplication Full Text
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[闫果果]'s Articles
[孙国胜]'s Articles
[刘兴昉]'s Articles
Baidu academic
Similar articles in Baidu academic
[闫果果]'s Articles
[孙国胜]'s Articles
[刘兴昉]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[闫果果]'s Articles
[孙国胜]'s Articles
[刘兴昉]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.