SEMI OpenIR  > 全固态光源实验室
一种采用双模式激光靶部击穿方式下的点火装置及方法
于海娟; 林学春; 高文焱; 张志研; 张玲; 邹淑珍; 王奕博; 陈寒
Rights Holder中国科学院半导体所
Date Available2016-09-12
Country中国
Subtype发明
Subject Area半导体器件
Application Date2015-08-24
Application NumberCN201510520760.X
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/27442
Collection全固态光源实验室
Recommended Citation
GB/T 7714
于海娟,林学春,高文焱,等. 一种采用双模式激光靶部击穿方式下的点火装置及方法.
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