| 栅极与源漏极异面的GaN基HEMT的结构及其制作方法 | |
| 程哲; 张韵; 张连 | |
| Rights Holder | 中国科学院半导体所 |
| Date Available | 2016-09-12 |
| Country | 中国 |
| Subtype | 发明 |
| Subject Area | 半导体器件 |
| Application Date | 2015-08-25 |
| Application Number | CN201510524897.2 |
| Document Type | 专利 |
| Identifier | http://ir.semi.ac.cn/handle/172111/27439 |
| Collection | 中科院半导体照明研发中心 |
| Recommended Citation GB/T 7714 | 程哲,张韵,张连. 栅极与源漏极异面的GaN基HEMT的结构及其制作方法. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 栅极与源漏极异面的GaN基HEMT的结构（354KB） | 限制开放 | License | Application Full Text | |||
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