| 环形检测电极面内伸缩谐振器设计及其制备方法 | |
| 张萌; 宁瑾; 司朝伟; 韩国威; 赵永梅 | |
| Rights Holder | 中国科学院半导体所 |
| Date Available | 2016-09-12 |
| Country | 中国 |
| Subtype | 发明 |
| Subject Area | 微电子学 |
| Application Date | 2015-11-20 |
| Application Number | CN201510810985.9 |
| Document Type | 专利 |
| Identifier | http://ir.semi.ac.cn/handle/172111/27413 |
| Collection | 半导体集成技术工程研究中心 |
| Recommended Citation GB/T 7714 | 张萌,宁瑾,司朝伟,等. 环形检测电极面内伸缩谐振器设计及其制备方法. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 环形检测电极面内伸缩谐振器设计及其制备方（1115KB） | 限制开放 | License | Application Full Text | |||
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