Knowledge Management System Of Institute of Semiconductors,CAS
| 均匀轴向力承片装置 | |
| 张冶金; 郑婉华; 王海玲; 彭红玲 | |
| Rights Holder | 中国科学院半导体所 |
| Date Available | 2016-09-12 |
| Country | 中国 |
| Subtype | 发明 |
| Subject Area | 半导体器件 |
| Application Date | 2015-12-08 |
| Application Number | CN201510896680.4 |
| Document Type | 专利 |
| Identifier | http://ir.semi.ac.cn/handle/172111/27406 |
| Collection | 固态光电信息技术实验室 |
| Recommended Citation GB/T 7714 | 张冶金,郑婉华,王海玲,等. 均匀轴向力承片装置. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 均匀轴向力承片装置.pdf（582KB） | 限制开放 | License | Application Full Text | |||
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