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一种氮化镓异质结肖特基二极管及其制备方法
李迪; 贾利芳; 何志; 樊中朝; 杨富华
Rights Holder中国科学院半导体所
Date Available2016-09-12
Country中国
Subtype发明
Subject Area微电子学
Application Date2014-06-17
Application NumberCN201410270490.7
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/27398
Collection半导体集成技术工程研究中心
Recommended Citation
GB/T 7714
李迪,贾利芳,何志,等. 一种氮化镓异质结肖特基二极管及其制备方法.
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