传感芯片及其制备方法 | |
陈弘达; 袁浚; 解意洋; 阚强; 耿照新 | |
Rights Holder | 中国科学院半导体所 |
Date Available | 2016-08-30 |
Country | 中国 |
Subtype | 发明 |
Subject Area | 光电子学 |
Application Date | 2014-12-24 |
Application Number | CN201410822223.6 |
Document Type | 专利 |
Identifier | http://ir.semi.ac.cn/handle/172111/27250 |
Collection | 光电子研究发展中心 |
Recommended Citation GB/T 7714 | 陈弘达,袁浚,解意洋,等. 传感芯片及其制备方法. |
Files in This Item: | ||||||
File Name/Size | DocType | Version | Access | License | ||
传感芯片及其制备方法.pdf(806KB) | 限制开放 | License | Application Full Text |
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