SEMI OpenIR  > 半导体集成技术工程研究中心
纳米尺度相变存储器新结构及关键工艺研发
付英春
Subtype博士
Thesis Advisor杨富华 ; 王晓峰
2015-06-02
Degree Grantor中国科学院研究生院
Place of Conferral北京
Degree Discipline微电子学与固体电子学
Keyword相变存储器 全限制 自对准 牺牲层 量子点
Subject Area半导体器件
Date Available2015-06-03
Document Type学位论文
Identifierhttp://ir.semi.ac.cn/handle/172111/26588
Collection半导体集成技术工程研究中心
Recommended Citation
GB/T 7714
付英春. 纳米尺度相变存储器新结构及关键工艺研发[D]. 北京. 中国科学院研究生院,2015.
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付英春-博士论文.pdf(2634KB) 限制开放LicenseApplication Full Text
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