SEMI OpenIR  > 中科院半导体材料科学重点实验室
蓝宝石衬底氮化铝材料HVPE生长研究
孔苏苏
Subtype硕士
Thesis Advisor杨少延
2015-06-01
Degree Grantor中国科学院研究生院
Place of Conferral北京
Degree Discipline材料工程
Keyword氮化铝 Hvpe 应力
Subject Area半导体材料
Date Available2015-06-02
Document Type学位论文
Identifierhttp://ir.semi.ac.cn/handle/172111/26570
Collection中科院半导体材料科学重点实验室
Recommended Citation
GB/T 7714
孔苏苏. 蓝宝石衬底氮化铝材料HVPE生长研究[D]. 北京. 中国科学院研究生院,2015.
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