SEMI OpenIR  > 半导体集成技术工程研究中心
硅微纳结构热电器件研究
祁洋洋
Subtype博士
Thesis Advisor杨富华 ; 王晓东 ; 张明亮
2015-05-31
Degree Grantor中国科学院大学
Place of Conferral北京
Degree Discipline微电子学与固体电子学
Keyword金属辅助化学腐蚀法 Si纳米线 热电器件 微纳结构
Subject Area半导体器件
Date Available2015-06-02
Document Type学位论文
Identifierhttp://ir.semi.ac.cn/handle/172111/26535
Collection半导体集成技术工程研究中心
Recommended Citation
GB/T 7714
祁洋洋. 硅微纳结构热电器件研究[D]. 北京. 中国科学院大学,2015.
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毕业论文正文 一般评审版.pdf(4058KB) 限制开放LicenseApplication Full Text
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