SEMI OpenIR  > 中科院半导体照明研发中心
蓝宝石图形衬底晶片及制备方法
王文军; 郭金霞; 赵冀; 王莉; 伊晓燕; 王军喜; 李晋闽
Rights Holder中国科学院半导体研究所
Date Available2014-09-17
Country中国
Subtype发明
Subject Area半导体器件
Application Date2014-06-25
Application NumberCN201410289596.1
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/25908
Collection中科院半导体照明研发中心
Recommended Citation
GB/T 7714
王文军,郭金霞,赵冀,等. 蓝宝石图形衬底晶片及制备方法.
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蓝宝石图形衬底晶片及制备方法.pdf(267KB) 限制开放LicenseApplication Full Text
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