| 制备硅基微电极的方法 | |
| 裴为华; 陈三元; 归强; 陈弘达 | |
| Rights Holder | 中国科学院半导体研究所 |
| Date Available | 2013-05-15 |
| Country | 中国 |
| Subtype | 发明 |
| Subject Area | 光电子学 |
| Application Date | 2013-02-28 |
| Application Number | CN201310062478.2 |
| Document Type | 专利 |
| Identifier | http://ir.semi.ac.cn/handle/172111/25868 |
| Collection | 光电子研究发展中心 |
| Recommended Citation GB/T 7714 | 裴为华,陈三元,归强,等. 制备硅基微电极的方法. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 制备硅基微电极的方法.pdf（436KB） | 限制开放 | License | Application Full Text | |||
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