SEMI OpenIR  > 光电系统实验室
光纤干涉仪多参数的综合测量系统
徐团伟; 方高升; 李芳; 刘育梁
Rights Holder中国科学院半导体研究所
Date Available2014-04-30
Country中国
Subtype发明
Subject Area光电子学
Application Date2014-01-23
Application NumberCN201410032166.1
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/25863
Collection光电系统实验室
Recommended Citation
GB/T 7714
徐团伟,方高升,李芳,等. 光纤干涉仪多参数的综合测量系统.
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