单片集成钛薄膜热电阻可调谐DFB激光器的制作方法 | |
张灿; 梁松; 朱洪亮 | |
Rights Holder | 中国科学院半导体研究所 |
Date Available | 2013-05-08 |
Country | 中国 |
Subtype | 发明 |
Subject Area | 半导体材料 |
Application Date | 2013-01-18 |
Application Number | CN201310019746.2 |
Document Type | 专利 |
Identifier | http://ir.semi.ac.cn/handle/172111/25804 |
Collection | 中科院半导体材料科学重点实验室 |
Recommended Citation GB/T 7714 | 张灿,梁松,朱洪亮. 单片集成钛薄膜热电阻可调谐DFB激光器的制作方法. |
Files in This Item: | ||||||
File Name/Size | DocType | Version | Access | License | ||
单片集成钛薄膜热电阻可调谐DFB激光器的(1005KB) | 限制开放 | License | Application Full Text |
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