| 氧化物膜的制备方法 | |
| 王晓峰; 尹玉华; 李丽娟; 霍自强; 王军喜; 李晋闽; 曾一平 | |
| Rights Holder | 中国科学院半导体研究所 |
| Date Available | 2014-05-07 |
| Country | 中国 |
| Subtype | 发明 |
| Subject Area | 半导体器件 |
| Application Date | 2014-02-08 |
| Application Number | CN201410045815.1 |
| Document Type | 专利 |
| Identifier | http://ir.semi.ac.cn/handle/172111/25775 |
| Collection | 中科院半导体照明研发中心 |
| Recommended Citation GB/T 7714 | 王晓峰,尹玉华,李丽娟,等. 氧化物膜的制备方法. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 氧化物膜的制备方法.pdf（1106KB） | 限制开放 | License | Application Full Text | |||
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