| 行星式旋转托盘装置 | |
| 刘立莉; 杨华; 路红喜; 郭金霞; 李璟 | |
| Rights Holder | 中国科学院半导体研究所 |
| Date Available | 2014-05-21 |
| Country | 中国 |
| Subtype | 发明 |
| Subject Area | 半导体器件 |
| Application Date | 2014-02-18 |
| Application Number | CN201410054225.5 |
| Document Type | 专利 |
| Identifier | http://ir.semi.ac.cn/handle/172111/25767 |
| Collection | 中科院半导体照明研发中心 |
| Recommended Citation GB/T 7714 | 刘立莉,杨华,路红喜,等. 行星式旋转托盘装置. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 行星式旋转托盘装置.pdf（908KB） | 限制开放 | License | Application Full Text | |||
Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.
Edit Comment