密封传动装置 | |
王晓亮; 崔磊; 肖红领; 殷海波; 冯春; 姜丽娟; 陈竑 | |
Rights Holder | 中国科学院半导体研究所 |
Date Available | 2014-05-07 |
Country | 中国 |
Subtype | 发明 |
Subject Area | 半导体材料 |
Application Date | 2014-01-15 |
Application Number | CN201410018204.8 |
Document Type | 专利 |
Identifier | http://ir.semi.ac.cn/handle/172111/25756 |
Collection | 中科院半导体材料科学重点实验室 |
Recommended Citation GB/T 7714 | 王晓亮,崔磊,肖红领,等. 密封传动装置. |
Files in This Item: | ||||||
File Name/Size | DocType | Version | Access | License | ||
密封传动装置.pdf(720KB) | 限制开放 | License | Application Full Text |
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