| 源输送混合比可调气路装置 | |
| 王晓亮; 肖红领; 陈竑; 殷海波; 冯春; 姜丽娟 | |
| Rights Holder | 中国科学院半导体研究所 |
| Date Available | 2014-06-25 |
| Country | 中国 |
| Subtype | 发明 |
| Subject Area | 半导体材料 |
| Application Date | 2014-03-13 |
| Application Number | CN201410092524.8 |
| Document Type | 专利 |
| Identifier | http://ir.semi.ac.cn/handle/172111/25753 |
| Collection | 中科院半导体材料科学重点实验室 |
| Recommended Citation GB/T 7714 | 王晓亮,肖红领,陈竑,等. 源输送混合比可调气路装置. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 源输送混合比可调气路装置.pdf（670KB） | 限制开放 | License | Application Full Text | |||
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