| 谐振式微机电系统机翼风力传感器及其制作方法 | |
| 钟卫威; 司朝伟; 韩国威; 宁瑾; 杨富华 | |
| Rights Holder | 中国科学院半导体研究所 |
| Date Available | 2013-05-22 |
| Country | 中国 |
| Subtype | 发明 |
| Subject Area | 微电子学 |
| Application Date | 2013-01-29 |
| Application Number | CN201310034847.7 |
| Document Type | 专利 |
| Identifier | http://ir.semi.ac.cn/handle/172111/25663 |
| Collection | 半导体集成技术工程研究中心 |
| Recommended Citation GB/T 7714 | 钟卫威,司朝伟,韩国威,等. 谐振式微机电系统机翼风力传感器及其制作方法. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 谐振式微机电系统机翼风力传感器及其制作方（836KB） | 限制开放 | License | Application Full Text | |||
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