| 调节电容式MEMS陀螺仪检测端谐振频率的电路和方法 | |
| 韩国威; 司朝伟; 钟卫威 | |
| Rights Holder | 中国科学院半导体研究所 |
| Date Available | 2013-06-05 |
| Country | 中国 |
| Subtype | 发明 |
| Subject Area | 半导体器件 |
| Application Date | 2013-01-30 |
| Application Number | CN201310035372.3 |
| Document Type | 专利 |
| Identifier | http://ir.semi.ac.cn/handle/172111/25662 |
| Collection | 半导体集成技术工程研究中心 |
| Recommended Citation GB/T 7714 | 韩国威,司朝伟,钟卫威. 调节电容式MEMS陀螺仪检测端谐振频率的电路和方法. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 调节电容式MEMS陀螺仪检测端谐振频率的（697KB） | 限制开放 | License | Application Full Text | |||
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