调节电容式MEMS陀螺仪检测端谐振频率的电路和方法 | |
韩国威; 司朝伟; 钟卫威 | |
Rights Holder | 中国科学院半导体研究所 |
Date Available | 2013-06-05 |
Country | 中国 |
Subtype | 发明 |
Subject Area | 半导体器件 |
Application Date | 2013-01-30 |
Application Number | CN201310035372.3 |
Document Type | 专利 |
Identifier | http://ir.semi.ac.cn/handle/172111/25662 |
Collection | 半导体集成技术工程研究中心 |
Recommended Citation GB/T 7714 | 韩国威,司朝伟,钟卫威. 调节电容式MEMS陀螺仪检测端谐振频率的电路和方法. |
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调节电容式MEMS陀螺仪检测端谐振频率的(697KB) | 限制开放 | License | Application Full Text |
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