SEMI OpenIR  > 半导体集成技术工程研究中心
调节电容式MEMS陀螺仪检测端谐振频率的电路和方法
韩国威; 司朝伟; 钟卫威
Rights Holder中国科学院半导体研究所
Date Available2013-06-05
Country中国
Subtype发明
Subject Area半导体器件
Application Date2013-01-30
Application NumberCN201310035372.3
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/25662
Collection半导体集成技术工程研究中心
Recommended Citation
GB/T 7714
韩国威,司朝伟,钟卫威. 调节电容式MEMS陀螺仪检测端谐振频率的电路和方法.
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