Knowledge Management System Of Institute of Semiconductors,CAS
| 利用AFM的探针制备图形衬底的定位纳米压印系统 | |
| 査国伟; 牛智川; 倪海桥; 尚向军; 贺振宏 | |
| Rights Holder | 中国科学院半导体研究所 |
| Date Available | 2014-02-19 |
| Country | 中国 |
| Subtype | 发明 |
| Subject Area | 半导体物理 |
| Application Date | 2013-11-21 |
| Application Number | CN201310594552.5 |
| Document Type | 专利 |
| Identifier | http://ir.semi.ac.cn/handle/172111/25452 |
| Collection | 半导体超晶格国家重点实验室 |
| Recommended Citation GB/T 7714 | 査国伟,牛智川,倪海桥,等. 利用AFM的探针制备图形衬底的定位纳米压印系统. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 利用AFM的探针制备图形衬底的定位纳米压（235KB） | 限制开放 | License | Application Full Text | |||
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